Katharina Lilienthal
Dr. Katharina Lilienthal – Project Manager and Plasma Etching Scientist at Fraunhofer IPMS, Department CNT – Driving Sustainable Innovations in Semiconductor Manufacturing
Dresden, Germany
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Initially graduated with a diploma in Mechanical Engineering, specializing in precision, micro-, and nanotechnology. Earned a PhD in micro- and nanoelectronics. Has been working for several years at Fraunhofer IPMS in the CNT department within the industry-oriented 300 mm cleanroom. Started in the “Interconnects” group, where work included, for example, the development of innovative CNT-Cu interconnects within the Dual Damascene process. Later specialized in the “Nano System Technology” area, focusing on metal etching for quantum applications, with an interdisciplinary progression towards integrating sustainability aspects into the semiconductor industry.
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Sustainability Management: Navigating Challenges in Evaluating & Optimizing from CMP to Plasma Etch
The presentation highlights the challenges of sustainability management from CMP to plasma etch. It focuses on the high effort required for data collection (LCI), energy and chemical consumption, as well as water and waste management. Targeted process optimization, material flow tracking, and collaboration enable the realization of sustainable savings potential.
20th Silicon Saxony Days Sessionize Event
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